超纯水检测

CNS 14639-2002 超纯水之导电率试验法

本标准规定超纯水之导电率试验方法。备考 l：以往在水之试验中，导电度及导电率之单位分别使用μS 及 μS/cm，槽常数单位即使用 cm-1。若将以 μS/m 单位表示之导电率数值乘以 0.01，则成为以 μS/cm 单位表示之数值。再者，若将以 m-1 表示之槽常数数值乘以 0.01，则成为以

Methods of test for electric conductivity in highly purified water

CNS 14642-2002 超纯水中阴离子之试验法

本标准规定超纯水中阴离子（氟化物离子、氯化物离子、亚硝酸离子、溴化物离子．磷酸离子、硝酸离子及硫酸离子）之试验方法。备考：本方法亦适用于超纯水以外之高度精制水中之阴离子试验方法

Methods of test for anions in highly purified water

KS I 3213-2009 超纯水中的微粒子测定方法

이 표준은 초순수 중의 미립자 측정방법에 대하여 규정한다.비고 이 방법은 초순수 이

Testing methods for concentration of fine particles in highly purified water

CNS 14641-2002 超纯水中二氧化硅之试验法

本标准规定超纯水中二氧化硅之试验方法。备考：本方法亦适用于超纯水以外之高度精制水中所含之二氧化硅

Methods of test for silica in highly purified water

CNS 14638-2002 超纯水中有机碳﹝TOC﹞之试验法

本标准规定超纯水中有机碳（TOC）（以下简称 TOC）之试验方法

Methods of test for total organic carbon in highly purified water

CNS 14640-2002 超纯水中金属元素之试验法

本标准规定超纯水中金属元素（钠、钾、钙、镁、铜、锌、铅、镉、镍、钴、锰、铬、铝及铁）之试验方法。备考 l：本方法亦通用于超纯水以外之高度分析用水中所含之金属元素试验。2：本标准中｛ ｝内之单位为公制，数值为近似值

Methods of test for metallic elements in highly purified water

ASTM D4453-02 超纯水样品搬运的标准实施规程

1.1 This practice covers concepts for handling ultra-pure water samples needed for the measurement of ever-decreasing levels of specified

Standard Practice for Handling of Ultra-Pure Water Samples

ASTM D4453-02(2006 超纯水样品搬运的标准实施规程

The determination of trace impurities (on the order of parts per billion) in ultra-pure water places extreme requirements on all

Standard Practice for Handling of Ultra-Pure Water Samples

ASTM D5127-13(2018 电子和半导体行业超纯水标准指南

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

T/DE 10-2022 实验室超纯水集中供水系统技术规范

本文件规定了实验室超纯水集中供水系统技术规范的术语与定义、分类、系统构成、系统要求、试验方法

ASTM D5127-07 电子学和半导体工业用超纯水标准指南

1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Six classifications

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

ASTM D5127-99 电子学和半导体工业用超纯水的标准指南

1.1 This guide covers the recommendations for the purity of water suitable for use in the electronics and microelectronics industry for purposes

Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry

ASTM D5127-13 电子学和半导体工业用超纯水的标准指南

4.1x00a0;This guide recommends the water quality required for the electronics

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

ASTM D5127-12 电子学和半导体工业用超纯水的标准指南

This guide recommends the water quality required for the electronics and microelectronics industries. High-purity water is required to prevent

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

VDI 2083 Blatt 13.1-2009 洁净室技术 超纯水的质量、生产和分配 基础知识

Zweck dieser Richtlinie ist die Zusammenfassung des Wissens bezüglich der Planung, dem Bau, dem Betrieb und der ?berwachung von

Cleanroom technology - Quality, production and distribution of ultrapure water - Fundamentals

CNS 14639-2002 超纯水之导电率试验法

本标准规定超纯水之导电率试验方法。备考 l：以往在水之试验中，导电度及导电率之单位分别使用μS 及 μS/cm，槽常数单位即使用 cm-1。若将以 μS/m 单位表示之导电率数值乘以 0.01，则成为以 μS/cm 单位表示之数值。再者，若将以 m-1 表示之槽常数数值乘以 0.01，则成为以

Methods of test for electric conductivity in highly purified water

CNS 14642-2002 超纯水中阴离子之试验法

本标准规定超纯水中阴离子（氟化物离子、氯化物离子、亚硝酸离子、溴化物离子．磷酸离子、硝酸离子及硫酸离子）之试验方法。备考：本方法亦适用于超纯水以外之高度精制水中之阴离子试验方法

Methods of test for anions in highly purified water

KS I 3213-2009 超纯水中的微粒子测定方法

이 표준은 초순수 중의 미립자 측정방법에 대하여 규정한다.비고 이 방법은 초순수 이

Testing methods for concentration of fine particles in highly purified water

CNS 14641-2002 超纯水中二氧化硅之试验法

本标准规定超纯水中二氧化硅之试验方法。备考：本方法亦适用于超纯水以外之高度精制水中所含之二氧化硅

Methods of test for silica in highly purified water

CNS 14638-2002 超纯水中有机碳﹝TOC﹞之试验法

本标准规定超纯水中有机碳（TOC）（以下简称 TOC）之试验方法

Methods of test for total organic carbon in highly purified water

CNS 14640-2002 超纯水中金属元素之试验法

本标准规定超纯水中金属元素（钠、钾、钙、镁、铜、锌、铅、镉、镍、钴、锰、铬、铝及铁）之试验方法。备考 l：本方法亦通用于超纯水以外之高度分析用水中所含之金属元素试验。2：本标准中｛ ｝内之单位为公制，数值为近似值

Methods of test for metallic elements in highly purified water

ASTM D4453-02 超纯水样品搬运的标准实施规程

1.1 This practice covers concepts for handling ultra-pure water samples needed for the measurement of ever-decreasing levels of specified

Standard Practice for Handling of Ultra-Pure Water Samples

ASTM D4453-02(2006 超纯水样品搬运的标准实施规程

The determination of trace impurities (on the order of parts per billion) in ultra-pure water places extreme requirements on all

Standard Practice for Handling of Ultra-Pure Water Samples

ASTM D5127-13(2018 电子和半导体行业超纯水标准指南

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

T/DE 10-2022 实验室超纯水集中供水系统技术规范

本文件规定了实验室超纯水集中供水系统技术规范的术语与定义、分类、系统构成、系统要求、试验方法

ASTM D5127-07 电子学和半导体工业用超纯水标准指南

1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Six classifications

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

ASTM D5127-99 电子学和半导体工业用超纯水的标准指南

1.1 This guide covers the recommendations for the purity of water suitable for use in the electronics and microelectronics industry for purposes

Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry

ASTM D5127-13 电子学和半导体工业用超纯水的标准指南

4.1x00a0;This guide recommends the water quality required for the electronics

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

ASTM D5127-12 电子学和半导体工业用超纯水的标准指南

This guide recommends the water quality required for the electronics and microelectronics industries. High-purity water is required to prevent

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

VDI 2083 Blatt 13.1-2009 洁净室技术 超纯水的质量、生产和分配 基础知识

Zweck dieser Richtlinie ist die Zusammenfassung des Wissens bezüglich der Planung, dem Bau, dem Betrieb und der ?berwachung von

Cleanroom technology - Quality, production and distribution of ultrapure water - Fundamentals